Konu "Ammonia flow rate" için Fakülteler listeleme
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The influence of thickness and ammonia flow rate on the properties of AlN layers
(Elsevier Sci Ltd, 2012)Undoped AlN layers have been grown on c-plane sapphire substrates by metal-organic chemical vapor deposition in order to study the effects of ammonia (NH3) flow rate and layer thickness on the structural quality and surface ...